High vacuum atomic force microscope for failure analysis
Park NX-Hivac allows failure analysis engineers to improve the sensitivity of their measurements through high vacuum Scanning Spreading Resistance Microscopy (SSRM). Because high vacuum scanning offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions, users can measure a wide range of dope concentration and signal response in failure analysis applications.
Performing Scanning Spreading Resistance Microscopy (SSRM) measurements under high-vacuum conditions can reduce the required tip-sample interaction force, which can significantly reduce damage to both the sample and the tip. This will extend the life of each tip, making scanning cheaper and more convenient, and can provide more accurate results by improving spatial resolution and signal to noise ratio. This makes high vacuum Scanning Spreading Resistance Microscopy (SSRM) measurements conducted with the NX-Hivac an excellent choice for failure analysis engineers looking to increase their throughput, reduce costs, and improve accuracy.
Park Hivac Manager
NX-Hivac auto vacuum control
High vacuum is controlled by Hivac Manger, pumping for the optimized vacuum condition and venting processes are logically and visually controlled by one-button clicking. Each process is visually monitored by color and schematic changes, you would not need to worry about the sequence of vacuum operation after click on a button. Faster and easier vacuum control software brings you ease of use AFM operation and better productivity.
Advanced automation features
The NX-Hivac features a range of tools that minimize the required input from the user. This means you can scan faster and increase your lab’s throughput.
StepScan Automation with Motorized stage
StepScan gives users the ability to program the device to image multiple regions quickly and easily. The NX-Hivac lets you scan a sample in just five steps: Scan, lift cantilever, move motorized stage to user defined coordinate, approach, and repeat. This boosts productivity enormously and reduces required user input to the absolute minimum.
Motorized laser alignment
Park’s motorized laser beam alignment lets the user seamlessly continue automated measurement routines without user input. With our advanced pre-aligned cantilever holder, the laser beam is focused on the cantilever upon tip exchange. The laser spot is then optimized along the X- and Y-axis by motorized positioning knobs.
Increasing accuracy and productivity
Although the NX-Hivac is the world’s most accurate high performance AFM, it is also one of the easiest to use and convenient AFMs for failure analysis applications. With Park NX-Hivac, you can increase your productivity and trust that your results are sound.
Closed-loop XY and Z Scanners
With two independent closed-loop XY and Z flexure scanners for the sample and probe tip, you can rest assured that your scans will be extremely accurate. The NX-Hivac offers flat and orthogonal XY scanning with low residual bow, offering out of plane motion less than 1 nm over the entire scan range. The NX-Hivac also features a high speeds Z scanner with a 15 μm scan range and Z scanner non-linearity is less than 0.5%. This provides accurate 2D and 3D measurements with no need for software processing.
Low Noise XYZ Position Sensors
The NX-Hivac features Park AFM’s industry leading low noise Z detector that can accurately measure sample topography while the low noise XY closed loop scan minimizes the forward and backward scan gap to less than 0.15% of the scan range.
24-bit Digital Electronics
Minimize wasted time and maximize accuracy with the trademark NX Series electronics controller featured in the NX-Hivac. Our controller is an all digital, 24-bit high speed device which gives the user the ability to perform a wide range of scans including our True Non-Contact mode. With its low noise design and high speed processing unit, the controller is ideal for precise voltage and current measurement as well as nano scale imaging. The embedded electronics also feature digital signal processing, allowing users to easily analyze measurements and imaging.
XY scanner: 50 μm × 50 μm (100 μm x 100 μm optional)
Z scanner: 15 μm
Objective lens: 10×
5M pixel CCD
XY stage travel: 22 mm, 22 mm
Sample size: 50 mm x 50 mm, up to 20 mm thickness
Inner vacuum chamber: 300 mm x 420 mm x 320 mm
Outer vacuum (including granite & pump): 800 mm x 950 mm x 730
SmartScan: Park AFM operating software
XEI: AFM data analysis software
Hivac Manager: Auto vacuum control software
Vacuum level: Typically less than 1 x 10-5 torr
Pumping speed: Reach to 10-5 torr within 5 min.
ADC: 18 channels
4 high-speed ADC channels (50 MSPS)
24-bit ADCs for X, Y, and Z position sensor
DAC: 12 channels
2 high-speed DAC channels (50 MSPS)
20-bit DACs for X, Y, and Z positioning
3 channels of integrated lock-in amplifier